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Patent number: 200810100562
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Method for preparing surface-enhanced Raman active substrate of large-area micro-nano tree structure array

The invention discloses a method for preparing a surface-enhanced Raman active substrate of a large-area micro-nano tree structure array. First, a large-area silicon micro-pillar array is prepared; and nanorods are grown on the silicon micro-pillar array using a nano-assembly technology. , To obtain a three-dimensional ordered periodic micro-nano structure array; and then using hydrothermal synthesis method to inlay three-dimensional ordered periodic micro-nano structure array with different shapes of metal nanoparticles. The SERS active substrate of the present invention can be uniformized from a large area to a centimeter level. The invention designs SERS active hot particles on a three-dimensional ordered micro / nano structure, and integrates the "antenna" enhancement effect, metal / semiconductor cross-enhancement effect and gap enhancement effect. It has a highly sensitive SERS activity, and the SERS active heat particles Firmly embedded in the dendritic micro-nano structure, it is suitable for both SERS testing of trace liquid analytes and SERS testing of trace gas analytes.

Method for preparing surface-enhanced Raman active substrate of large-area micro-nano tree structure array

A method for preparing a surface-enhanced Raman active substrate of a large-area micro / nano tree structure array is characterized in that it includes the following steps in order: (1) Preparation of a large-area silicon micrometer column array: a. Ultraviolet lithography is used in A micron dot pattern is realized on a silicon wafer; b. A silicon micro-pillar array is prepared on the silicon wafer by a plasma dry etching technique; (2) A large area is formed on the silicon micro-pillar array by a nano-assembly technology. The nanorods are grown uniformly to obtain a three-dimensional ordered periodic micro / nano structure array. (3) Hydrothermal synthesis is used to inlaid metal nanoparticles with different morphologies in the three-dimensional ordered periodic micro / nano structure array.



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Patent No: 200810100562
Application date: May 12, 2008
Open / Announcement Date: October 8, 2008
Authorization announcement date:
Applicant / Patentee: Hefei Institute of Intelligent Machinery, Chinese Academy of Sciences
Country / Province: Anhui (34)
Postcode: 230031
Inventor / Designer: Zhao Aiwu, Mei Tao, Wang Dapeng, Ni Lin
agent: Yu Chengjun
Patent Agency: (34112)
Patent Agency Address: ()
Patent Type: invention
public account: 101281133
Announcement date:
Authorization date:
Bulletin number: 000000000
priority:
Approval history:
Number of figures: 7
Pages: 5
Number of claims: 2
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